丝网印刷法制备GPP芯片工艺

徐长坡; 李豆

doi:10.13890/j.issn.1000-128x.2021.05.021

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丝网印刷法制备GPP芯片工艺

工艺与制造技术 | 更新时间：2021-12-13

- 丝网印刷法制备GPP芯片工艺
- Preparation of GPP Chips Based on Screen Printing Method
- 机车电传动 2021年第5期页码：134-137
- 作者机构：
  
  1.天津环鑫科技发展有限公司，天津　300384
- 作者简介：
  
  李豆（1989—），女，硕士，工程师，主要从事电子元器件工艺改善工作；E-mail: lidou@tjsemi.com
- 基金信息：
- DOI：10.13890/j.issn.1000-128x.2021.05.021
  中图分类号：
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徐长坡, 李豆. 丝网印刷法制备GPP芯片工艺[J]. 机车电传动, 2021,(5):134-137.

Changpo XU, Dou LI. Preparation of GPP Chips Based on Screen Printing Method[J]. Electric Drive for Locomotives, 2021,(5):134-137.
徐长坡, 李豆. 丝网印刷法制备GPP芯片工艺[J]. 机车电传动, 2021,(5):134-137. DOI： 10.13890/j.issn.1000-128x.2021.05.021.

Changpo XU, Dou LI. Preparation of GPP Chips Based on Screen Printing Method[J]. Electric Drive for Locomotives, 2021,(5):134-137. DOI： 10.13890/j.issn.1000-128x.2021.05.021.

摘要

玻璃钝化类器件（Glassivation Passivation Parts，GPP)是在普通硅整流扩散片的基础上对拟分割的管芯P/N结面四周烧制1层玻璃，由于玻璃与单晶硅有很好的结合特性，使P/N结可获得最佳保护，提高器件的稳定性。文章通过试验完成了丝网印刷法的工业化生产，确定了丝网印刷保护层浆料工艺、丝网印刷玻璃层浆料工艺和丝网印刷玻璃层的烘干工艺，实现了丝网印刷法制备GPP芯片25万片/月的工业化生产能力。

Abstract

Glassivation passivation parts (GPP) is a general term for glass passivation devices. Based on the ordinary silicon rectifier diffusion sheet, a layer of glass is burned around the P/N junction surface of the pipe core to be divided. The glass has a good combination characteristic with monocrystalline silicon, which can make the P/N junction obtain the best protection and improve the stability of the device. By completing the industrial production of screen printing through experiments, the paste of screen printing protective layer, screen printing glass layer slurry technology and the drying process of screen printing glass layer were determined,and the industrial production capacity of 250 000 GPP wafers per month by screen printing was realized.

关键词

GPP芯片丝网印刷法保护层油墨玻璃钝化玻璃气泡工业生产

Keywords

GPP chipscreen printing methodprotective layer inkglass passivationglass bubbleindustrial production

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