碳化硅沟槽栅MOSFET技术研究进展

罗海辉; 李诚瞻; 姚尧; 杨松霖

doi:10.13890/j.issn.1000-128X.2023.05.002

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碳化硅沟槽栅MOSFET技术研究进展

综述 | 更新时间：2023-10-12

- 碳化硅沟槽栅MOSFET技术研究进展
- A review on research development of SiC trench gate MOSFET technology
- 机车电传动 2023年第5期页码：10-25
- 作者机构：
  
  1.株洲中车时代半导体有限公司，湖南株洲　　412001
  2.功率半导体与集成技术全国重点实验室，湖南株洲;412001
- 作者简介：
  
  罗海辉（1982—），男，博士，正高级工程师，主要从事功率半导体器件芯片与应用技术研究；E-mail: luohh@csrzic.com
- 基金信息：
  
  湖南省科技重大项目(2021GK1180)
- DOI：10.13890/j.issn.1000-128X.2023.05.002
  中图分类号：
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罗海辉, 李诚瞻, 姚尧, 等. 碳化硅沟槽栅MOSFET技术研究进展[J]. 机车电传动, 2023,(5):10-25.

LUO Haihui, LI Chengzhan, YAO Yao, et al. A review on research development of SiC trench gate MOSFET technology[J]. Electric Drive for Locomotives, 2023,(5):10-25.
罗海辉, 李诚瞻, 姚尧, 等. 碳化硅沟槽栅MOSFET技术研究进展[J]. 机车电传动, 2023,(5):10-25. DOI： 10.13890/j.issn.1000-128X.2023.05.002.

LUO Haihui, LI Chengzhan, YAO Yao, et al. A review on research development of SiC trench gate MOSFET technology[J]. Electric Drive for Locomotives, 2023,(5):10-25. DOI： 10.13890/j.issn.1000-128X.2023.05.002.

摘要

第三代宽禁带半导体碳化硅金属氧化物半导体场效应晶体管（SiC MOSFET）具备耐高压、耐高温和低损耗等优点，迅速成为行业的研究热点。文章结合SiC功率MOSFET器件发展历史，探讨了从平面栅技术发展到沟槽栅技术的必要性，介绍了SiC沟槽栅MOSFET结构设计、沟槽刻蚀工艺和沟槽栅氧工艺等核心问题的研究进展与技术挑战，并对未来新型SiC沟槽栅MOSFET技术进行了展望。

Abstract

The third-generation wide-bandgap semiconductor silicon carbide (SiC) MOSFET devices have rapidly become a research hotspot in the production and research sectors due to their advantages, such as high voltage resistance, high-temperature resistance and low loss. This paper, in conjunction with the development history of SiC MOSFET devices, discussed the necessity of transitioning from planar gate technology to trench gate technology. It elaborated on the technical challenges and research progress related to SiC trench gate MOSFET structure design, trench etching processes, trench gate oxide processes and other core issues. Finally, it provided an outlook for future advanced SiC trench gate MOSFET technology.

关键词

碳化硅沟槽栅MOSFET沟槽工艺沟槽栅氧沟槽结构新型沟槽

Keywords

silicon carbidetrench gate MOSFETtrench processtrench gate oxidetrench structurenovel trench technology

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